"Regulus Series" is a brand new FE-SEM brand of Hitachi High-Technologies, including "Regulus8100" developed as a successor model of SU8010, and "Regulus8220" "Regulus8230" "Regulus8240", an upgrade of the SU8200 series. There are 4 models in total. The resolution and operability have been enhanced.
Scanning electron microscope (SEM) is widely used in nanotechnology, semiconductor and electronics industry, life science, material science and other fields of material structure observation. In recent years, research on new carbon materials, polymer materials, composite materials, etc., which are widely anticipated in the application of new generation electronic devices, has been hailed worldwide as the backbone of advanced science and technology. Scanning electron microscopes are widely used for the observation and evaluation of these materials, but ultra-high resolution is not enough. It is also required to be able to observe the surface fine structure and highly sensitive element analysis under low accelerating voltage. In addition, in the long-term research process, the continuous stability and reliability of the performance of the electron microscope are also pursued.
The electronic optical system of the new brand "Regulus Series" released this time has been optimized, so that the resolution of the landing voltage at 1kV is increased by approximately 20% compared to the previous model. "Regulus8220/8230/8240" has a resolution of 0.9nm, and "Regulus8100" has a resolution of 1.1 nm. In addition, the cold-field electron gun, which is most suitable for high-resolution observation under low acceleration voltage, can enlarge the details of the sample and obtain high-quality pictures. The maximum magnification has also been increased from the previous 1 million times to 2 million times.
In addition, in order to better deal with the test and maintenance of different samples and exert high performance, user auxiliary functions have been enhanced, such as the operation auxiliary function of the signal detection system and the maintenance auxiliary function.
Main feature
Equipped with a cold field electron gun with minimal chromatic aberration suitable for low acceleration voltage and high resolution observation
Compared with the previous model, the resolution is about 20% higher
(Regulus8220/8230/8240: 0.9 nm/1 kV, Regulus8100: 1.1 nm/1 kV)
Maximum magnification increased from 1 million times to 2 million times*1
User assistance functions to help users fully utilize the high performance of the instrument
The main parameters
|
Name |
Regulus8100 |
Regulus8240/8230/8220 |
|
Secondary electron resolution |
0.8 nm(Acceleration voltage 15 kV)
1.1 nm(Landing voltage 1 kV) *2 |
0.7 nm(Acceleration voltage 15 kV)
0.9 nm(Landing voltage 1 kV) *2 |
|
Accelerating voltage |
0.5~30 kV |
0.5~30 kV |
|
Landing voltage*2 |
0.1~2 kV |
0.01~20 kV |
|
Magnification |
20~1,000,000 times*3 |
20~2,000,000 times*3 |
|
Motor control |
3-axis automatic *4 |
5-axis automatic |
*1 Regulus8240/8230/8220 only
*2 Deceleration mode observation
*3 127 mm × 95 mm field of view magnification
*4 5-axis motor table is optional