Purpose:
MSP-20-UM is a special gold spraying instrument designed for conducting conductive treatment of SEM/TEM samples and making FIB sample protective film, and spraying metal coating on the surface of the sample.
How it works:
MSP-20-UM uses a flat-panel control electrode to perform magnetron sputtering spraying through voltage discharge.
Product advantages:
* Low sputtering voltage: effectively reduce ion damage and thermal damage to the sample.
* Movable sample stage: When working, the sample temperature rise is small, which can effectively prevent sample deformation due to ion sputtering.
* MSP-20-UM is a device that can automatically finish spraying as long as the "START" button is activated.
How to:
Put the sample into the sample chamber, set the spraying time according to the thickness of the coating. After pressing the start button, the whole process from pre-pumping to spraying will be carried out automatically. After spraying, the rotary pump will automatically stop, and the sample chamber will be filled with air Then you can take out the sample
Technical parameters:
|
Vacuum system |
Pumping speed 50 L/ min |
|
Vacuum degree of sample chamber |
Pirani vacuum gauge measures the vacuum value below 1Pa |
|
Distance from electrode to sample |
40mm |
|
Sample room size |
82mm high, 149mm diameter, made of heat-resistant glass |
|
Target size |
Diameter 51 mm, thickness 0.1mm |
|
Target type |
Standard: Platinum |
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Sample stage size |
Standard: diameter ≤50mm, height ≤25mm |
|
Device size |
Length 350mm× width 420 mm× height 347mm. Weight: 18 Kg |
|
Gas |
Argon, air |