MSP-20-UM ion milling system
Use:
MSP-20-UM is a special gold spraying instrument designed for conducting conductive treatment of SEM/TEM samples and making protective film for FIB samples. It sprays metal coating on the surface of the samples.
Working principle:
MSP-20-UM uses a flat-panel control electrode to perform magnetron sputtering spraying through voltage discharge.
Product advantages:
* Low sputtering voltage: effectively reduce the ion damage and thermal damage to the sample.
* Movable sample stage: When working, the sample temperature rise is small, which can effectively prevent sample deformation due to ion sputtering.
* MSP-20-UM is a device that can automatically finish spraying as long as the "START" button is activated.
Operation method:
Put the sample in the sample chamber, set the spraying time according to the thickness of the coating. After pressing the start button, the whole process from pre-pumping to spraying will be carried out automatically. After spraying is finished, the rotary pump will automatically stop, and the sample chamber will be filled with air The sample can be taken out later
Technical parameter:
| Vacuum system |
Pumping speed 50 L/ min |
| Vacuum degree of sample chamber |
Pirani vacuum gauge measures the vacuum value, reaching below 1Pa |
| Distance from electrode to sample |
40mm |
| Sample room size |
82mm high, 149mm diameter, made of heat-resistant glass |
| Target size |
Diameter 51 mm, thickness 0.1mm |
| Target type |
Standard configuration: platinum |
| Sample stage size |
Standard: diameter ≤50mm, height ≤25mm |
| Equipment size |
Length 350mm × width 420 mm × height 347mm. Weight: 18 Kg |
| Gas |
Argon, air |