Product description:
The use of magnetron-type electrodes minimizes damage to the sample.
Feature:
Using LCD touch screen, you can set the processing conditions more easily
Can handle thicker or larger samples (optional accessory)
Memory function can store common processing conditions
Specification:
| Project |
Illustrate |
| Discharge |
Type |
Magnetron diode discharge type (the electric field is perpendicular to the magnetic field) |
| Electrode composition |
Anti-parallel plate (embedded magnet) |
| Voltage |
Maximum 0.4 kV DC (DC variable) |
| Current |
Max. 40 mA DC |
Spraying rate *1
Pressure: 7 Pa
Discharge current: 40 mA
The distance between the target and the sample surface: 20 mm |
Pt target (optional accessory) |
15 nm/min |
| Pt-Pd target (optional accessory) |
20 nm/min |
| Au target (optional accessory) |
35 nm/min |
| Au-Pd target (optional accessory) |
25 nm/min |
| Sample size |
The maximum diameter |
φ60 mm |
| Maximum height |
20 mm |
| Mechanical pump |
135/162 l/min (50/60Hz) |
| Target material*2 |
Pt , Pt-Pd (8:2) , Au , Au-Pd (6:4) |
| Power requirements |
Single phase, 100 V AC (±10%) 15 A (50/60 Hz), 3-pin plug cable (3 m) |
| Size |
width |
450 mm |
| Length |
391 mm |
| Height |
390 mm |
| Weight |
Host: about 25 kg
Mechanical pump: about 28 kg |