Use:
MSP-1S is a special gold spraying instrument designed for SEM sample preparation, spraying metal coating on the sample surface.
Working principle:
The MSP-1S uses a flat control electrode to perform magnetron sputtering spraying through low-voltage discharge.
Product advantages:
* Low arcing voltage: effectively reduce the ion damage and thermal damage to the sample.
* Movable sample stage: When working, the sample temperature rise is small, which can effectively prevent sample deformation due to ion sputtering.
* Built-in vacuum pump, integrated design
* MSP-1S is a device that can automatically finish spraying as long as the "EVAC" button is activated.
Operation method:
Put the sample in the sample chamber, set the spraying time according to the thickness of the coating. After pressing the start button, the whole process from pre-pumping to spraying will be carried out automatically. After spraying is finished, the rotary pump will automatically stop, and the sample chamber will be filled with air The sample can be taken out later
Technical parameter:
|
Vacuum system |
Pumping speed 20 L/min, rotary pump can pump up to 2 Pa |
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Vacuum degree of sample chamber |
Keep the vacuum degree during sputtering at 6 ~ 8 Pa |
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Distance between target and sample |
Standard 25 mm, the auxiliary platform can also be adjusted to increase the distance to 35 mm |
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Sample room size |
Height 65 mm, diameter 120 mm, made of heat-resistant glass |
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Target size |
Diameter 55 mm |
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Target type |
Standard gold-palladium, optional gold, platinum, gold-palladium alloy, platinum |
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Sample stage |
The diameter is 50 mm. Movable sample stage separated from anode |
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Equipment size |
Length 200 mm × width 340 mm × height 350 mm. Weight: 14 Kg |
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Power supply |
100 V single-phase alternating current with a maximum current of 10 A |