Product description
The NanoX-2000/3000 series of 3D optical interference profilers are based on phase-shifting interferometry (PSI), white light vertical scanning interferometry (VSI) and monochromatic light vertical scanning interferometry (CSI). The measurement accuracy and repeatability (stability) quantitatively reflect the surface roughness, surface profile, step height, size of key parts and their topographic characteristics of the tested part. It is widely used in integrated circuit manufacturing, MEMS, aerospace, precision machining, surface engineering technology, materials, solar cell technology and other fields.
Product advantages
◇ Core technology and system software developed in Silicon Valley, USA
◇ The key hardware adopts well-known brands such as the United States, Germany, Japan, etc.
PI Nano Mobile Platform and Control System
Nikon interference objectives
NI signal control board and Labview64 control software
TMC Optical Vibration Isolation Table
◇ The repeatability of measurement accuracy has reached the world's advanced level (Certificate of Chinese Academy of Metrology)
Application field
3D optical interference profiler-NanoX-2000/3000 series
◇ Measurement mode Phase-shifting interference (PSI), white light vertical scanning interference (VSI), monochromatic light vertical scanning interference (CSI)
◇ Sample table 150mm/200mm/300mm sample table (optional)
XY translation: ±25mm/150mm/200mm/300mm, tilt: ±5°
Optional manual/electric sample stage
◇ CCD camera pixels Standard configuration: 1280×960
◇ Field of view 560×750um (10×objective lens)
The specific field of view depends on the equipped objective lens and CCD camera
◇ Optical system Coaxial illumination infinity interference imaging system
◇ Light source High efficiency LED
◇ Z-direction focus 80mm manual focus (optional electric focus)
◇ Z-direction scanning range Precision PZT scanning (optional high-precision mechanical scanning, extended to 10mm)
◇ Vertical resolution ＜0.1nm
◇ RMS repeatability* 0.005nm, 1σ
◇ Step measurement** accuracy ≤0.75%; repeatability ≤0.1%, 1σ
◇ Lateral resolution ≥0.35um (100 times objective lens)
◇ Detection speed ≤ 35um/sec, related to the selected CCD and scanning mode